BROOKS 5850EM Series Metal Sealed Thermal Mass Flow Controllers
Proven long-term stability. Ultra-pure performance for high pressure applications.
Description
Proven long-term stability. Ultra-pure performance for high pressure applications.
Models 5850EM / 5851EM
| Performance | |
| Repeatability | 0.2% of rate |
| Response Time | Normally Ciosed Valve: <3 secOptional: 600 msec |
| Flow Range (Full Scale Capacity) | 3 socm -30,000 sccm |
| Linearity | ±0.5% FS.(included in accuracy) |
| Accuracy | 19 F.s. incl. linearity 1.5%6 FS. incl: linearity >20 slpm |
| Multi-Gas & Range Configurability | – |
| Pressure Transient Insensitivity | – |
| Control Range | 2.3%-100% |
| Number of Bins | N/A |
| Valve Shut Down | N/A |
| Zero Stablllty | <±0.5% F.5. per year |
| Mechanical | |
| Wetted Materials | Valve Seat: 316L, Vitons fluoroelastomers, Buna-N, Kalrez® or Teflon® |
| Seal Material | Metal |
| Level of Purity/ Surface Finish | 316L VAR, 316L, and high alloy ferritic stainless steel |
| Valve Options | Normally Closed, Normally Open Meter (no valve) |
| Electrical | |
| Analog communication |
4-20 mA
0-5 Vdc
|
| Digital Communication | – |
| Electrical Connection |
15 Pin D Connector(DA-15P) |
| Power Supply/Consumption |
Normally Closed valve: 3.25 watts
Normally Open valve: 10.5 watts
|
| Ratings | |
| Max Temperature | 65°C |
| Max Pressure | 1500 psi |
| PDifferential Pressure Range |
5 -50 psi (gas and range dependent)
|
| Leak Integrity |
1×10-10 atm cc/sec He
|
| Diagnostics & Display | |
| Diagnostic Capability | – |
| Status Lights |
MFC Health, Network Status |
| Alarms | Control Valve Output, Network Interruption |
| Diagnostic/Service Port | N/A |
| Compliance | |
| EMC | (89/336/EEC) per 61326 |
| Environmental Compliance | N/A |
Features:
- Long-term zero stability of less than 0.2% full scale per year
- Settling time of less than 3 seconds with negligible overshoot/undershoot when commanding changes
- Wide flow range from 3 sccm up to 30,000 slpm
- High pressure rating of up to 1,500 psi
- Optional enhanced internal process finish with a 5µ inch Ra average
- Removable flow sensor
- Insensitive to mounting attitude
- Mechanical and electrical compatibility with other mass flow controllers
- TTL compatible “valve off” and purge function
Benefits:
- All-metal flow path enhances gas purity and reduces leaks
- Proven long-term stability and accuracy across a broad range of processes and applications
- Excellent return on investment due to reliable performance
- Removable flow sensor eliminates the need for continuous monitoring and readjustment of gas pressures
- Easy installation and servicing with analog-only inputs/outputs
Applications:
- Fiber Optic
- LED/MOCVD
- Semiconductor
- Solar
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