BROOKS 5850EMH Series High Temperature Mass Flow Controllers
Proven long-term stability. Ultra-pure performance for high temperature applications.
Description
Proven long-term stability. Ultra-pure performance for high temperature applications.
Models 5850EMH / 5851EMH
| Performance | |
| Repeatability | <+0.25% SP |
| Response Time | <3 sec to within 2% of SP(per SEMlE17-91) |
| Flow Range (Full Scale Capacity) | 100 slm(N2 equivalent) |
| Linearity | Included in accuracy |
| Accuracy | 1% of FS |
| Mechanical | |
| Wetted Materials | 316L,316L VAR, & high alloy ferric SS |
| Seal Material | Metal |
| Level of Purity/ Surface Finish | – |
| Valve Options |
Normally Open
Normally Closed
|
| Electrical | |
| Diagnostic Capability | – |
| Analog communication | 0-5 Vdc |
| Digital Communication | – |
| Electrical Connection | 15-Pin”D” connector |
| Power Supply/Consumption | ±15 Vdc @ 350 mA(max) |
| Ratings | |
| Max Temperature | 105°C |
| Max Pressure | 1 MPa (145 psi) |
| Differential Pressure Range |
50-350 kPa(7 -50 psid)
|
| Leak Integrity |
1×10-10 atm cc/sec He (1×10-11 Pa m3 /sec)
|
Features:
- Long-term zero stability: <0.2% full scale per year
- Settling time: <3 seconds with negligible overshoot/undershoot
- Wide flow range: 3 sccm to 30,000 slpm
- High pressure rating: up to 1,500 psi
- Optional enhanced internal process finish: 5µ inch Ra average
- Removable flow sensor
- Insensitive to mounting attitude
- Mechanical and electrical compatibility with other mass flow controllers
- TTL compatible “valve off” and purge function
Benefits:
- All-metal flow path enhances gas purity and reduces leaks
- Proven long-term stability and accuracy across various processes and applications
- Reliable performance ensures excellent return on investment
- Removable flow sensor eliminates the need for continuous monitoring and gas pressure readjustment
- Easy installation and servicing with analog-only inputs/outputs
Applications:
- Fiber Optic
- LED/MOCVD
- Semiconductor
- Solar
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