BROOKS GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters

Features:

• Long-term zero stability of less than ±0.15% full scale per year
• Settling times: 300 ms – less than 1 second
• Full-scale flow rates up to 300 slpm
• All-metal seal flow path with an option for 5µ or 10µ inch Ra surface finish
• Corrosion-resistant Hastelloy® T-Rise sensor for improved measurement reproducibility at elevated temperatures
• MultiFloTM gas and range programmability allows for thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
• Convenient user display and independent diagnostic/service port aid device installation, monitoring, and troubleshooting
• GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low-pressure drop mass flow controller designed for the delivery of sub-atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
• GF120xHT high-temperature mass flow controller can withstand operating environments of up to 150°C

Benefits:

• Exceptional performance
• Rapid reaction times improve application efficiency
• Flexible topology allows for virtually limitless network configurations
• Simple and robust configuration, diagnostics, and maintenance
• Affordability with a standard Ethernet port

Applications:

• Semiconductor etch tools
• Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
• Physical vapor deposition (PVD) systems
• Epitaxial process systems
• Advanced strip processes