BROOKS GF120xHT Series Metal Sealed High-Temperature Thermal Mass Flow Controllers & Meters
High-purity flow path. Outstanding performance and reliability for high-temperature applications.
Description
High-purity flow path. Outstanding performance and reliability for high-temperature applications.
| Performance | |
| Repeatability | <+0.15% SP |
| Response Time | Normally Closed Valve: <1 sec |
| Flow Range (Full Scale Capacity) | 50 sccm -5 slm(N2 equivalent) |
| Accuracy | +1% SP >35-100% +0.35% FS 2-35% |
| Mechanical | |
| Seal Material | Metal |
| Level of Purity/ Surface Finish | 5μ inch Ra avg |
| Electrical | |
| Diagnostic Capability | Available |
| Analog communication | 0-5 Vdc |
| Digital Communication | DeviceNetrm, EtherCAT®,RS-485 L-Protocol |
| Ratings | |
| Max Temperature | 150°C |
| Max Pressure | 500 psia |
Features:
- Designed for high-temperature applications up to 150°C
- Convenient service port for easy access to diagnostics through a user-friendly interface
- Corrosion-resistant Hastelloy sensor
- Calibrated to the customer’s specific process conditions
Benefits:
- Ability to support applications up to 150°C for the delivery of liquid precursors
- User-friendly diagnostics interface assists process engineers in ensuring the MFC operates within specified limits, maximizing yield and uptime
- Unmatched long-term sensor stability for optimal throughput and yields
- Calibrated at the customer’s operating temperature and pressure for optimal performance
Applications:
- Advanced Strip Processes
- Atomic Layer Deposition (ALD)
- Deposition
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