BROOKS GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

One device. Multiple gases and flows. Maximum flexibility.

Category: BROOKS

One device. Multiple gases and flows. Maximum flexibility.

Performance
Repeatability	0.20% S.P.
Response Time	Normally Closed Valve: <1 sec
Flow Range (Full Scale Capacity)	3 sccm -50 slpm
Linearity	+0.5% FS (included in accuracy)
Accuracy	1% of SP 35-100%,0.35% of FS 2-35%
Multi-Gas & Range Configurability	MultiFlo tm Available
Pressure Coefficient	0.03% per psi(0-50psi Nz)
Control Range	<2-100%
Number of Bins	10 Bins
Valve Shut Down	Closes valve when set point drops below 1.5% full scale
Zero Stability	<+0.5% F.S. per year

Mechanical
Wetted Materials	316 Stainless Steel, Hastelloy C-22, 1707 PH,43055
Seal Material	Elastomer Seal
Level of Purity/ Surface Finish	16μ inch Ra
Valve Options	Normally Closed Normally Open Meter (no valve)
Surface Finish	32μ inch Ra

Electrical
Analog communication	0-5 V 0-10 V 0-20 mA.4-20 mA
Digital Communication	DeviceNetTM EtherCAT® Profibus RS485
Electrical Connection	DeviceNetrm:1 x M12 with threaded coupling nut (B) EtherCATe: 5-pin M8 with threaded coupling nut/2 x RJ45 Profibuse:1×15-pin Male Sub-D/1 x9-pin female Sub-D RS485:1×15-pin Male Sub-D,(A
Power Supply/Consumption	Analog/RS-485 From +12 Vdc to +24 Vdc: 7 Watt/8 Watt DeviceNetTM From +11 Vdc to +25 Vdc: 7 Watt/8 Watt EtherCAT® /Profibus® From +13.5 Vdc to +27 Vdc: 7 Watt/8 Watt

Ratings
Max Temperature	5-50°C(41-122°F)
Max Pressure	150 psig/10 bar
Differential Pressure Range	3-860 sccm=7-45 psid 861-7200 sccm=15-45 psid 7201-55000 sccm=25-45 psid *Contact Brooks Technical Support for more information
Leak Integrity	1×10-10 atm cc/sec He

Compliance
Certifications/Approvals	CE: EN61326: 2006 (FCC Part 15 & Canada lC-subset of CE testing) Safety EN61010-1
Environmental Compliance	RoHS Directive(2011/65/EU) REACH Directive EC 1907/2006
Size	Compact

Features:

Programmable multi-gas/multi-range capabilities
Brooks® MultiFlo™ gas database with extensive native gas runs for correction functions
Sub-1 second flow response time and 1% set point accuracy for demanding applications
Suitable for a wide variety of gases
Fast response with Hastelloy sensor
Easily accessible diagnostic service port independent of tool communication
Multi-protocol communication options: DeviceNet™, EtherCAT®, Profibus®, and RS-485 analog interface

Benefits:

MultiFlo™ technology allows new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
Simple and user-friendly MultiFlo™ programming enables gas selection in under 60 seconds
Reduces inventory for OEMs and large end users by consolidating gas and range-specific controllers
Excellent process gas accuracy supported by superior metrology systems and calibration based on global standards
Corrosion-resistant sensor ensures unmatched long-term stability, maximizing yield and throughput
User-accessible service port simplifies troubleshooting and diagnostics
Cost-effective elastomer seals for flexibility across various applications
Multi-protocol communication interface supports integration into existing systems

Applications: