BROOKS GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters

Raises the standard in performance for value-driven metal sealed applications.

Category: BROOKS

GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters

Raises the standard in performance for value-driven metal sealed applications.

Performance
Repeatability	<±0.2% S.P
Response Time	Normally Closed Valve: <1 sec
Flow Range (Full Scale Capacity)	3 sccm – 55 slm
Linearity	+0.5% FS.(included in accuracy)
Accuracy	+1% S.P. 35-100% +0.35% F.S.<5-35%
Multi-Gas & Range Configurability	MultiFlo tm Available
Pressure Transient Insensitivity	–
Control Range	<5%-100%
Number of Bins	Standard GF Series: 11 bins High Flow GF Series: 4 bins
Valve Shut Down	Standard GF Series: < 1% F.S. Hiah Flow GF Series: < 4% of Standard Confiquration F.S. @ 30psig/atm out N2 equiv.
Zero Stability	<+0.5% F.S. per year

Mechanical
Wetted Materials	316 Stainless Steel Hastelloy C-22 17-7 PH 430SS KM-45
Seal Material	Metal
Level of Purity/ Surface Finish	16μ inch Ra
Valve Options	Normally Closed Meter (no valve)

Electrical
Analog communication	0-20 mA 4-20 mA 0-5 Vdc 0-10 Vdc
Digital Communication	DeviceNetTm Profibus® RS485 S-Protocol RS485 L-Protocol
Electrical Connection	Profibus/Analog via 9-Pin “D” connector RS485/Analog via 9-Pin”D” connector, 15-Pin “D” connector DeviceNetrm via 5-Pin “M12” connector
Power Supply/Consumption	Standard GF Series: RS485 from +12 Vdc to +24 Vdc=7 Watts max Profibus from +13.5 Vdc to +27 Vdc =7 Watts max DeviceNettm from +11 Vdc to +25 Vdc =13.6 Watts max High Flow GF Series: RS485 from +12 Vdc to +24 Vdc = 3.3 Watts max Profibus from +13.5 Vdc to +27 Vdc =3.3 Watts max

Ratings
Max Temperature	50°C
Max Pressure	Standard GF Series: 150 psig (10 bar) High Flow GF Series: Meter= 75 psig (5 bar), Controller = 150 psig (10 bar)
Differential Pressure Range	3-860 sccm=7-45 psid 861-7200 sccm=15-45 psid 7201-50000 sccm=25-45 psid 51-300 slm=30-90 psid (typical pressure drops)
Leak Integrity	1×10-10 atm cc/sec He

Compliance
EMC	CE: EN6126: 2006 (FCC Part 15 & Canada lC-subset of CE testing)
Environmental Compliance	Safety EN61010-1 RoHS

Features:

Long-term zero stability of less than ±0.5% full scale per year
Settling times of less than 1 second
Full-scale flow rates up to 300 slpm
All-metal seal flow path with a 16µ inch Ra surface finish
Corrosion-resistant Hastelloy® sensor suitable for gases prone to thermal decomposition, operating at lower temperatures
Programmable MultiFloTM capability allows for thousands of gas types and range combinations without removing the MFC from the gas line, maintaining accuracy
Best-in-class temperature coefficient specification with active temperature compensation
Embedded self-test routines and independent diagnostic/service port
Slimline body with VCR fittings
DeviceNetTM, Profibus®, RS-485, and analog interfaces

Benefits:

Fast settling time of less than 1 second reduces wasted gas and process variability
No elastomer seals that can experience oxygen permeation and require replacement over time
MultiFloTM simplifies and streamlines the process of changing process gases, eliminating the need to remove and recalibrate MFCs
Quick and easy configuration of new gases and ranges in under 60 seconds
Measurement accuracy remains unaffected by temperature variations
Convenient access to diagnostics port for maximum uptime
Compact size facilitates integration into tight machine spaces and makes it an excellent choice for retrofits
Multi-protocol communication interface simplifies integration into existing systems

Applications:

Cost-efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
Reduction of MFC inventory in six-inch/eight-inch semiconductor fabs
MOCVD for LED and power device manufacturing
Solar/thin film chemical vapor deposition (CVD) systems
Analytical OEM equipment