HORIBA D700MG High Speed & Precision Pressure Insensitive Mass Flow Module
In critical semiconductor manufacturing processes, there is a constant need for precise gas flow control devices that facilitate future innovations and seamless transitions from the laboratory to the fabrication of cutting-edge memory and logic devices. HORIBA introduces the new pressure-based MFC D700MG as an upgraded model of the D500MG, specifically designed to address the challenges faced by customers in this industry.
High Speed & Precision Pressure Insensitive Mass Flow Module
In critical semiconductor manufacturing processes, there is a constant need for precise gas flow control devices that facilitate future innovations and seamless transitions from the laboratory to the fabrication of cutting-edge memory and logic devices. HORIBA introduces the new pressure-based MFC D700MG as an upgraded model of the D500MG, specifically designed to address the challenges faced by customers in this industry.
- On-Tool Gas and Full Scale Configuration Change *Only EtherCAT
- Provide flexibility to process optimization
- 100ms Step-up Response & MFC-to-MFC deviation control
- Deliver high productivity and greater process performance
- MRMG functionality for small flow rate(Bin101 – Bin105)
- Provide flexibility to process requiring small flow rate
- Better Valve Shut-off and Corrosion Resistance by PFA nozzle
- Robustness with less particle risk reduce down time and optimize yield
- State Monitor Function
- Provide more internal data for smarter failure prediction
Download
Related products
HORIBA D700T Best Performance Pressure Insensitive Mass Flow Module
HORIBA D700WR Wide Range Pressure Insensitive Mass Flow Module
HORIBA SEC-8000 F/D/E Series High Temperature Digital Mass Flow Controller
HORIBA DZ-100 Ultra-thin Mass Flow Module DZ-114S
HORIBA SEC-Z500X Series Multi Range/Multi Gas Digital Mass Flow Controller
HORIBA FS-3000 Thermal Flow Splitter
HORIBA D700uF Micro Flow Pressure Insensitive Mass Flow Module
