HORIBA D700T Best Performance Pressure Insensitive Mass Flow Module

D700T is a high-performance, pressure-insensitive mass flow module specifically designed for critical semiconductor manufacturing processes. It incorporates HORIBA CRITERION pressure-based flow measurement and control technology, ensuring exceptional repeatability and accuracy. What sets the D700T apart is its utilization of a patented advanced flow control algorithm and a twin valve structure, allowing customer’s gas delivery system to address multiple challenges effectively.

The D700T offers a fast settling time of ≤100 msec for all operations, including Set to Set, Step up, and Step down. It provides pressure insensitivity in both the inlet and outlet. The module features advanced failure detection capabilities to diagnose pressure sensor shifts, valve seat leaks, and changes in flow accuracy. It achieves repeatability within 0.15% S.P. The best accuracy specification is within 0.45% S.P.* (Standard: 0.8% S.P.). The D700T has a wider operating temperature range of 15-60 °C.