HORIBA D700uF Micro Flow Pressure Insensitive Mass Flow Module
D700uF(Micro Flow) is designed for ≤ 5SCCM flow application.
≤ 5SCCM flow control has been very critical in high aspect ratio process.
Specialized components and newly developed in-house low flow standard allow high accuracy flow control down to 0.025SCCM.
Description
D700uF(Micro Flow) is designed for ≤ 5SCCM flow application.
≤ 5SCCM flow control has been very critical in high aspect ratio process.
Specialized components and newly developed in-house low flow standard allow high accuracy flow control down to 0.025SCCM.
- Down to 0.025SCCM flow control capability
- Precise tuning gas control, enhance process tunability
- ≤ 100ms Step-up Response & MFC-to-MFC deviation control
- Deliver high productivity and greater process performance
- In-House flow metrology
- Reliable performance from all manufactured products
- State Monitor Function
- Provide more internal data for smarter failure prediction
- Better Valve Shut-off and Corrosion Resistance by PFA nozzle
- Robustness with less particle risk reduce down time and optimize yield
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