HORIBA SEC-E Series Mass Flow Controller

Mass Flow Controller

The SEC-E Series mass flow controller is equipped with a reliable thermal sensor and solenoid valve, enabling precise control of gas flow. This versatile component finds applications in various industries.

Key features of the mass flow controller include:

• Wide range of flow rate control: The controller can handle flow rates ranging from 10 SCCM to 200 SLM (N2).
• Integration into diverse manufacturing systems: It is suitable for integration into manufacturing systems for LCDs, photovoltaic cells, power semiconductors, coatings, and more.
• Applicability to general industries: The controller can be used for controlling burner gases, atmospheric gases, generating mixed gases, and measuring ventilation volume.
• Research & Development: It is suitable for equipment used to evaluate the performance of various gas sensors, combustors, and in biotechnology-related evaluations.
• Laboratory applications: The controller can be used in laboratories for gas flow control in various experiments, sampling gases, and more.