INFICON Pirani vacuum gauge PSG50x & PSG51x Atmospheric pressure to medium vacuum gauge
The INFICON Pirani standard vacuum gauges PSG500, PSG502-S, PSG510-S, and PSG512-S adopt the most advanced digital Pirani technology on the market today. The stainless steel sensor unit is sturdy and durable, with a compact structural design, suitable for semiconductor systems and standard applications, such as front-end vacuum tubes.
Description
The INFICON Pirani standard vacuum gauges PSG500, PSG502-S, PSG510-S, and PSG512-S adopt the most advanced digital Pirani technology on the market today. The stainless steel sensor unit is sturdy and durable, with a compact structural design, suitable for semiconductor systems and standard applications, such as front-end vacuum tubes.
Advantage
Easy one click adjustment of ATM and HV
Durable design that saves space
Aluminum shell
Can be installed in any direction
Stainless steel measuring unit with metal sealed feeding device
Logarithmic signal output, easy to integrate
Threaded joint with 10 bar absolute overpressure capability
250 ° C baking device
Nickel wire option, suitable for corrosive applications
Ceramic feeding device, suitable for highly corrosive applications (PSG510 and PSG512)
Optional Setpoints
Compliant with RoHS standards
specifications
PSG500 tungsten
PSG500-S tungsten, setpoints
PSG502-S nickel, setpoints
PSG510-S tungsten, setpoints, ceramic feedthroughs
PSG512-S nickel, setpoints, ceramic feedthroughs
| Measurement range |
+1.9 … +10.0 V
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| Accuracy (N2) |
1 x 10-3 … 100 mbar | ±15 % of reading |
| 5 x 10-4 … 1 x 10-3 mbar | ±50 % of reading | |
| 100 … 1000 mbar | ±50 % of reading | |
| Repeatability (air) | 1 x 10-3 … 100 mbar | ±2 % of reading |
| Admissible temperature |
Operation (ambient) | +5 … +60 °C |
| Vacuum connection | 80 / 250 °C | |
| Storage | -20 … +65 °C | |
| Supply voltage | At gauge | +14 …+30 V (dc) |
| Ripple | ≤1 V (p-p) | |
| Power consumption | ≤1 W | |
| Materials exposed to vacuum |
glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435
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