MKS 355 Micro-Ion® Hot Cathode Vacuum Pressure Transducers
Measurement Range(N2, air):
1 x 10-9 to 5 x 10-2 Torr
1 x 10-9 to 7 x 10-2 mbar
1 x 10-7 to 7 Pa
Description
Specifications
| Type | Vacuum Transducer |
| Sensor |
Hot Cathode
|
| Display | 2 digits plus exponent, green LED (optional) |
| Measurement Range(N2, air) | 1 x 10-9 to 5 x 10-2 Torr 1 x 10-9 to 7 x 10-2 mbar 1 x 10-7 to 7 Pa |
| Analog Output | 1 Volt/decade, logarithmic, 0 to 9 V |
| Power Requirements | 24 VDC ±15%, 12 W max |
| Internal Volume | 10.8 cc |
| Exposed Materials | 304 stainless steel, alumina, tantalum, tungsten, CuAg eutectic, Kovar |
| Relays | 0 or 2 (optional) |
| Electronic Casing and Flange | Aluminum extrusion |
| Remote Input Signals |
Filament on/off, degas on/off and emission current are set by continuity to ground
|
| Remote Output Signals |
Filament and degas on/off status are determined by an open collector transistor
|
| Operating Temperature |
0° to 40°C
|
| Storage Temperature |
-40°C to 70°C
|
| Maximum Bakeout Temperature |
200°C maximum (with electronics removed)
|
| Weight |
370 gm (12 oz) with NW16 KF flange
|
| Compliance |
CE, SEMI S2
|
| Filament |
yttria-coated iridium or tungsten
|
| Connectors |
9-pin Type “D” male
|
| Overpressure Protection |
Gauge turns off at factory set upper pressure limit (adjustable)
|
| Emission Current |
0.02 mA, 1.0 mA, or 4 mA
|
| Degas |
Electron bombardment, 3 W with 2-minute timer
|
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