MKS 390 Micro-Ion® ATM Modular Vacuum Pressure Transducers
Differential Measurement Range:
1 x 10-9 Torr to atmosphere
1.33 x 10-9 mbar to atmosphere
1.33 x 10-7 Pascal to atmosphere
(air or N2)
Description
Specifications
| Differential Measurement Range |
-750 to +250 Torr
-999 to +188 mbar
-99.9 to 18.8 kPascal
|
| Absolute Measurement Range(air, N2) |
1 x 10-9 Torr to atmosphere
1.33 x 10-9 mbar to atmosphere
1.33 x 10-7 Pascal to atmosphere
|
| Type vacuum transducer | SensorIonization gauge |
| Display | Graphics LCD (optional) |
| Analog OutputAbsolute | Logarithmic, 0.5 to 7.0 VDC, 0.5 V per decade |
| Differential | Linear 1-5 VDC, -750 to +250 Torr Internal Volume10.8 cc |
| Exposed Materials | 304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass |
| Electronic Casing and Flange | Aluminum Extrusion with Powder-coat |
| Operating Temperature |
010° to 40°C (50° to 104°F)
|
| Storage Temperature |
-40° to +70°C (-40° to +158°F)
|
| Maximum Bakeout Temperature |
105°C (221°F) maximum, with electronics removed
|
| Weight |
728.5 gm (25.7 oz) – 2.75 ConFlat fitting)
|
| Compliance |
CE
|
| Span Temperature |
Coefficient-10
X-ray Limit3 x 10-10 Torr 4 x 10-10 mbar |
| LED Indicator |
Module status
|
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