MKS 627H 0.02-25,000 Torr, Heated (45°C) Absolute Baratron® Capacitance Manometers
The 627H Heated (45°C) Absolute Baratron® Capacitance Manometer is temperature controlled to 45°C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater is in control.
Description
Overview
The 627H Heated (45°C) Absolute Baratron® Capacitance Manometer is temperature controlled to 45°C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater is in control.
Temperature controlled to 45°C for 0.12% of reading accuracy
0 to 10 VDC analog output proportional to absolute pressure
Full Scale ranges low as 20 mTorr for precise low pressure measurement
All-Inconel corrosion-resistant wetted surfaces
Integrated sump (US patent #5,822,685) provides particle protection
Measures total pressure directly, independent of gas composition
Specifications
| Type | Vacuum/pressure Transducer |
| Measurement Type |
Absolute
|
| Sensor Temperature | Controlled to 45°C |
| Full Scale Pressure Ranges | 0.02, 0.05, 0.1, 0.25, 1, 2, 10, 20, 100, 1000, 2000, 5000, 10000, 15 000, 20000, 25000 Torr |
| Accuracy | 0.12% of Reading 0.15% for 0.25, 0.1, and 0.05 Torr |
| Resolution | 0.001% of Full Scale 0.002% of Full Scale for 0.02 and 0.05 Torr |
| Analog Output | 0-10 VDC into >10K Ω load |
| Zero Temperature Coefficient |
0.002% of Full Scale/°C for 1-25000 Torr range
0.005% Full Scale/°C for 0.25 and 0.1 Torr 0.015% Full Scale/°C for 0.05 Torr 0.03% Full Scale/°C for 0.02 Torr |
| Span Temperature Coefficient |
0.02% of Reading/°C
|
| Operating Temperature Range |
15-40°C
|
| Volume |
6.3 cc
|
| Warm-up Time |
2 hours for 25000 Torr Full Scale, 4 hours for 0.1 Torr Full Scale and lower
|
| Overpressure Limit |
45 psia (310 kPa) or 120% of Full Scale, whichever is greater
|
| Exposed Materials |
Inconel
|
| Power Requirements |
±15 VDC ±5% @ 0.25 Amps (max.)
|
| Compliance |
CE
|
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