MKS 901P MicroPirani™ and Piezo Loadlock Vacuum Pressure Transducers
Absolute Measurement Range: 1.0 x 10-5 to 1,500 Torr
Differential Measurement Range: -760 to +760 Torr
Description
Specifications
| Absolute Measurement Range | 1.0 x 10-5 to 1,500 Torr |
| Differential Measurement Range | -760 to +760 Torr |
| Digital Communication | RS485/RS232 (4800-230400 Baud) |
| Sensor |
MicroPirani™ (MEMS Thermal Conductivity)
Piezo differential (MEMS diaphragm) |
| Relays | 3 relays SPDT (optional) |
| Set Point Range | Absolute: 5.0 x 10-4 to 1000 Torr:Differential: -760 to +100 Torr |
| Calibration Gas | Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, xenon, Neon |
| Operating Temperature | 0-40°C (32-104°F) |
| Maximum Bakeout Temperature | 85°C (185°F), non-operating |
| Digital Controls | Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test |
| Digital Status | Pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer |
| Analog Output | 1 to 9 VDC, 1 VDC/decade, 100Ω maximum output impedance (16 bit) |
| Optional Analog Output 2 | Piezo Differential: 5 VDC = 0 Torr, 1 VDC/decade (12 bit) |
| Relay Contact Rating | 1 A @ 30 VAC/VDC resistive |
| Relay Response |
100 msec maximum
|
| Power Requirements |
RS232/RS485: 9 to 30 VDC, < 1.2 watts max
EtherCAT: 9 to 30 VDC, < 2 watts max |
| MicroPirani Accuracy |
5 x 10-4 to 1 x 10-3 Torr ±10% of reading
1 x 10-3 to 100 Torr ±5% of reading 100 Torr to Atm ±25% of reading |
| MicroPirani Repeatability |
1 x 10-3 to 100 Torr ±2% of reading
|
| Piezo Differential Accuracy |
-10 to +10 Torr ±10% of reading
-100 to -10 Torr ±8% of reading -760 to -100 Torr ±1% of reading +10 to 100 Torr ±5% of reading |
| Piezo Differential Repeatability |
-760 to +10 Torr ±1% of reading
|
| Piezo Differential Zero Stability |
±0.1% of Full Scale (Full Scale = 760 Torr)
|
| Overpressure Limit |
1500 Torr (Absolute)
|
| Internal Volume |
(KF16) 2.8 cc
|
| Exposed Materials |
Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton®
|
| Electronic Casing and Flange |
304 Stainless Steel
|
| Weight |
0.37 lb (170 g) with KF16 flange
|
| Compliance |
CE
|
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