MKS 902B Absolute Piezo Vacuum Pressure Transducers
Measurement Range:0.1-1000 Torr
Digital Communication: RS485, RS232 or EtherCAT
Description
Specifications
| Digital Communication | RS485, RS232 or EtherCAT |
| Sensor |
Stainless steel enclosed Piezo (Absolute Pressure)
|
| Relays | Three relays SPDT EtherCAT 1 relay SPDT (Optional) |
| Installation Orientation | Any |
| Measurement Range | 0.1-1000 Torr |
| Set Point Range | 1-1000 Torr |
| Operating Temperature | 0-40°C (32-104°F) |
| Maximum Bakeout Temperature | 100°C (non-operating) |
| Analog Output | 0-10 VDC, 100 Ω maximum output impedance, linear or logarithmic (Absolute Pressure) |
| Analog Output Resolution | 16 bit |
| Relay Contact Rating | 1 A @ 30 VAC/VDC resistive |
| Relay Response |
100 ms maximum
|
| Power Requirements |
9 to 30 VDC < 1.2 watt maximum
EtherCAT 24V ±15% |
| Accuracy |
100-1000 Torr ±1% of Reading
10-100 Torr ±5% of Reading |
| Repeatability |
100-1000 Torr ±0.3% of Reading
10-100 Torr ±1% of Reading |
| Overpressure Limit |
1500 Torr
|
| Internal Volume |
1.023 cc (KF16)
|
| Exposed Materials |
316 Stainless Steel
|
| Electronic Casing and Flange |
304 Stainless Steel
|
| Weight |
0.37 lb (170 g) with KF16 flange
|
| Compliance |
CE, ETG 5003.1, ETG 5003.2, ETG 5003.2080
|
| Digital Output Resolution |
0.1 Torr
|
| Zero Temperature Coefficient |
0.01% of Full Scale/°C
|
| Span Temperature Coefficient |
0.02% of Reading/°C
|
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