MKS 925 Micro Pirani™ Vacuum Pressure Transducers
Digital Communication: RS485/RS232 (4800-230400 Baud)
Description
Specifications
| Digital Communication | RS485/RS232 (4800-230400 Baud) |
| Sensor |
MicroPirani™ (MEMS Thermal Conductivity)
|
| Relays | 3 relays SPDT (optional) |
| Installation Orientation | Any |
| Set Point Range | 5.0 x 10-4 Torr to 500 Torr |
| Calibration Gas | Air, Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, xenon, Neon |
| Operating Temperature | 0-40°C (32-104°F) |
| Maximum Bakeout Temperature | 85°C (185°F), non-operating |
| Digital Controls | Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test |
| Digital Status | Pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer |
| Analog Output | 1 to 9 VDC, 100Ω maximum output impedance, 1 volt/decade |
| Analog Output Resolution | 16 bit |
| Relay Contact Rating | 1 A @ 30 VAC/VDC resistive |
| Relay Response |
<100 msec maximum
|
| Power Requirements |
9 to 30 VDC, < 1.5 watts max
|
| Accuracy |
5 x 10-4 to 10-3 Torr ±10% of reading
10-3 to 100 Torr ±5% of reading 100 Torr to atm ±25% of reading |
| Repeatability |
10-3 to 100 Torr ± 2% of reading
|
| Overpressure Limit |
3000 Torr absolute
|
| Internal Volume |
(KF16) 2.80 cc
|
| Exposed Materials |
304 stainless steel, Silicon, SiO2, Si3N4, Gold, Viton®, Low out gassing epoxy resin
|
| Electronic Casing and Flange |
304 Stainless Steel
|
| Weight |
0.37 lb (170 g) with KF16 flange
|
| Compliance |
CE
|
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