MKS 972B DualMag™ Cold Cathode and MicroPirani™ Vacuum Pressure Transducers
Absolute Measurement Range: 1 x 10-8 Torr to Atmosphere
Description
Specifications
| Type | Vacuum Transducer |
| Sensor |
Cold Cathode – MicroPirani™
|
| Digital Communication | RS485, RS232 or EtherCAT |
| Absolute Measurement Range | 1 x 10-8 Torr to Atmosphere |
| Analog Output | 0.5 VDC per decade |
| Power Requirements | 9-30 VDC, 2 W |
| Internal Volume | 21 cc |
| Exposed Materials | 304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic |
| Relays | 3 relays, SPST |
| Relay Contact Rating | 1 A @ 30VAC/DC, resistive |
| Electronic Casing and Flange | 304 stainless steel |
| Calibration Gas |
Nitrogen
|
| Set Point Range |
1 x 10-8 Torr to Atmosphere
|
| Operating Temperature |
0-40°C (32-104°F)
|
| Maximum Bakeout Temperature |
85°C (185°F), non-operating
|
| Weight |
12.7 oz (360 g)
|
| Compliance |
CE
|
| Filament |
yttria-coated iridium or tungsten
|
| Connectors |
RS232 or RS485: 15-pin D-subminiature male
|
| EtherCAT |
One 15-pin D-subminiature male, Two RJ45 female
|
| Installation Orientation |
Any
|
| Overpressure Limit |
1500 Torr
|
| Repeatability |
5 x 10-8 Torr to 10-3 ± 30% of reading
10-3 to 100 ±2% of reading |
| Accuracy |
5 x 10-8 Torr to 10-3 ± 30% of reading
10-3 to 100 ±5% of reading |
| Digital Controls |
Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
|
| Digital Status |
Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
|
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