MKS C-Series Compact, Ultrafast Mass Flow Controllers CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller

The CMA10B Mass Flow Controller (MFC) is a compact, fast-response model with a MEMS-based flow sensor for non-corrosive gas applications. It supports Full Scale flow rates from 15 to 14,000 sccm (N2) and a control range from 0.1% to 100% of Full Scale. Available as both a flow controller and a flow meter, it offers analog (0-5 VDC) or digital (RS485, PROFINET®, Modbus TCP/IP) communication interfaces and requires a 24 VDC power supply.

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CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller

The CMA10B Mass Flow Controller (MFC) is a compact, fast-response model with a MEMS-based flow sensor for non-corrosive gas applications. It supports Full Scale flow rates from 15 to 14,000 sccm (N2) and a control range from 0.1% to 100% of Full Scale. Available as both a flow controller and a flow meter, it offers analog (0-5 VDC) or digital (RS485, PROFINET®, Modbus TCP/IP) communication interfaces and requires a 24 VDC power supply.

Features include:
– Ultrafast response time of <100 msec
– Control range from 0.1% to 100% of Full Scale
– Accuracy of ±0.8% of set point
– Minimal zero and span drift for long-term reproducibility
– Surface mount interface for compact gas panel design
– Embedded web browser for setup and diagnostics

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