MKS G-Series Fast and Repeatable Mass Flow Controllers GM100A Metal-sealed 50-100 slm Mass Flow Controllers
The G-Series GM100A mass flow controller offers digital control with either analog (0-5 VDC or 4-20 mA) or digital I/O options, including RS485, Profibus™, EtherCAT®, PROFINET, and DeviceNet™. Utilizing advanced MKS algorithms, it ensures fast and repeatable response times of around 500 milliseconds. Digital calibration provides 1% set point accuracy.
Multi-gas, Multi-range, Metal-sealed 50 to 100 slm Mass Flow Controller
The G-Series GM100A mass flow controller offers digital control with either analog (0-5 VDC or 4-20 mA) or digital I/O options, including RS485, Profibus™, EtherCAT®, PROFINET, and DeviceNet™. Utilizing advanced MKS algorithms, it ensures fast and repeatable response times of around 500 milliseconds. Digital calibration provides 1% set point accuracy.
Features include:
– Flow rates from 50 to 100 slm
– Metal sealed with elastomer plug
– Various digital (EtherCAT, DeviceNet™, Profibus®, PROFINET, RS485) or analog (0-5 VDC, 4-20 mA) I/O options
– Standard closed conductance leak rate below 1.0% of Full Scale
– Settling time under 750 milliseconds
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