Sevenstar Mass Flow Controller CS100 MFCs
Enhanced Accuracy and Fast Response
The CS100 MFC offers improved accuracy with a tolerance of ±1.0% of S.P., and it boasts a fast response time of less than 1 second.
Description
Specification
| Type | CS100A | |||
| Valve Rest Position | Normally Closed | No Valve | ||
| Full scale range (N2) |
(0～10,20,30,50,100,200,300,500) SCCM
(0～1,2,3,5,10,20,30,50) SLM
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| Accuracy | ±1.0% S.P. (≥35% F.S.)； ±0.35% F.S.(＜35% F.S.) | |||
| Linearity | ±0.5% F.S. | |||
| Repeatability | ±0.2% F.S. | |||
| Response Time | ≤ 1 sec | |||
| Valve Rest Position | 400 ~ 600 KPa | ＜0.03MPa | 400 ~ 600 KPa | ＜0.03MPa |
| Differential Pressure |
0.05～0.35MPa； FLOW≤10 SLM
0.1～0.35MPa ； 10＜FLOW≤30 SLM
0.25～0.45MPa ； 30＜FLOW≤50 SLM
|
＜0.02 MPa | ||
| Temperature Coefficient |
Zero: ≤±0.05% F.S/℃； Span: ≤±0.1% F.S/℃ | |||
| Max Pressure | 3MPa | 10MPa | ||
| Leak integrity | 1×10-9 Pa·m3 / sec He（1×10-8 atm·cc / sec He） | |||
| Wetted Materials | Viton | |||
| Maximum operating pressure | operating pressure | |||
| Operation Temperature | （5～45）℃ | |||
| Input Signal | Analog: (0～5)VDC |
Digital: RS485 | N/A | N/A |
| Output Signal | Analog: (0～5)VDC |
Digital: RS485 | Analog: (0～5)VDC | Digital: RS485 |
| Electronic Connector | 9 pin male sub-D； 15 pin male sub-D |
9 pin male sub-D； 3 pin male O |
9 pin male sub-D； 15 pin male sub-D |
15 pin male sub-D |
| Power Supply | ±15V | +24V | ±15V | +24V |
| ATUO ZERO | SUPPORT | |||
| Fittings |
Compression Fittingφ6； Compression Fittingφ3；
Compression Fitting1/4´´；Compression Fitting1/8´´；
VCR1/4″male；
Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose;
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| Surface Finish | 25μinch Ra | |||
| Weight | 1.2 Kg | 1 Kg | ||
Features:
- Enhanced Accuracy and Fast Response
The CS100 MFC offers improved accuracy with a tolerance of ±1.0% of S.P., and it boasts a fast response time of less than 1 second. - Additional Functions
Each model of the CS100 MFC includes powerful customer software as standard, and customers can choose from a range of additional functions to suit their specific needs. These features include support for multi-gas and multi-range applications, auto-zero capability, alarms, soft start, and delay. - Customization
The CS100 MFC provides customization options to meet individual requirements. It can be tailored to support ±15V double-end or +24V single-end power supply. Customers can select the interface that best suits their needs, such as RS485, and choose between digital or analog input and output. The MFC can also be customized with either a metal seal or elastomer seal, and it offers the flexibility to adhere to SEMI standard or compact mechanical dimensions.
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