Sevenstar Mass Flow Controller CS200 MFC
The CS200 MFC offers improved accuracy with a tolerance of ±1.0% of S.P., and advanced models feature a reduced response time of less than 0.8 seconds.
Description
Specification
| Type | CS200A | CS200C | CS200D | CS210A | CS210-D | |
| Full scale range (N2) |
( 0～5,10,20,30,50,100,200,300,500)SCCM
( 0～1,2,3,5,10,20,30,50)SLM
|
( 0～5,10,20,30,50,100,200,300,500)SCCM
( 0～1,2,3,5,10,20,30)SLM
|
( 0～5,10,20,30,50,100,200,300,500)SCCM
( 0～1,2,3,5,10,20,30,50)SLM
|
|||
| Accuracy | ±1.0% F.S(＜35% F.S.) | ±0.35% F.S(＜35% F.S.) | ||||
| Linearity | ±0.5% F.S. | |||||
| Repeatability | ±0.2% F.S. | |||||
| Response Time | ≤1sec | ≤0.8 sec (SEMI E17-0600) | ≤1sec | ≤ 0.8 sec (SEMI E17-0600) | ||
| Valve Rest Position | Normally Closed or Normally Open(100 sccm≤F.S.≤5 slm) | No Valve | Normally Closed or Normally Open(100 sccm≤F.S.≤5 slm) | No Valve | Normally Closed or Normally Open(100 sccm≤F.S.≤5 slm) | No Valve |
| Differential Pressure |
0.05～0.35MPa (Flow≤10slm)
0.1～0.35MPa (10slm＜Flow≤30slm)
0.2～0.45MPa (Flow＞30slm)
|
＜0.02MPa |
0.05～0.35MPa (Flow≤10slm)
0.1～0.35MPa (＞10slm)
|
＜0.02MPa |
0.05～0.35MPa (Flow≤10slm)
0.1～0.35MPa (＞10slm)
|
0.05～0.35MPa (Flow≤10slm)
0.1～0.35MPa (＞10slm)
|
| Maximum Pressure Working | 0.45MPa | |||||
|
Temperature
Coefficient
|
Zero:≤±0.05% F.S./℃;
F.S./℃ (Flow≤30slm)
≤±0.2% F.S./℃ (Flow>30slm)
|
Span: ≤±0.1% | Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃ |
Zero:≤±0.05% F.S./℃;
Span: ≤±0.1% F.S./℃ （Flow≤30slm）
Span: ≤±0.2% F.S./℃ （Flow>30slm）
|
Zero:≤±0.02% F.S./℃;
Span:≤±0.05% F.S./℃
|
|
| Proof Pressure | 3MPa (435pisg) | |||||
| Leak integrity | 1×10-9 atm·cc / sec He | 1×10-10atm·cc / sec He | 1×10-9 atm·cc / sec He | 1×10-10 atm·cc / sec He | ||
| Wetted Materials | Viton | Metal?(Stainless Steel V/V, 5Ra) | Metal | Viton | Metal | |
| Surface Chemistry | – | Cr/Fe ratio ＞2.0; CrO thickness ＞20 Angstroms | – | |||
| Operation Temperature | （5～45）℃ | （0～50）℃ | （5～45）℃ | |||
| Input Signal | Digital: RS485 or ProfiBus or DeviceNetTM Analog:(0～5)VDC or (4～20)mA or(0～20)mA | N/A | Digital: RS485 or ProfiBus or DeviceNetTM Analog:(0～5)VDC or (4～20)mA or (0～20)mA | N/A | Digital: RS485 or EtherCAT | N/A |
| Output Signal | Digital: RS485 or DeviceNetTMor ProfiBus or EtherCAT | Analog:(0～5)VDC or (4～20)mA or (0～20)mA | Digital: RS485 or EtherCAT | |||
| Power Supply | ±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA) | +20.4 ~ +26.4 VDC | ||||
| Fittings |
VCR1/4” M； VCO1/4” M；
Compression FittingΦ10;Compression FittingΦ6；
Compression Fitting 3/8”; Compression Fitting1/4”；
Compression Fitting1/8”; Compression FittingΦ3；
Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose;W-seal，A-sael ;
|
VCR1/4” M;
Compression FittingΦ6,
Compression FittingΦ3,
Compression Fitting1/4”，
W-seal，C-seal
|
VCR1/4” M； VCO1/4” M；
Compression FittingΦ10;Compression FittingΦ6；
Compression Fitting 3/8”; Compression Fitting1/4”；
Compression Fitting1/8”; Compression FittingΦ3；
Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose;
A-sael ;
|
VCR1/4” M;
Compression FittingΦ6,
Compression FittingΦ3,
Compression Fitting1/4”，
W-seal，
C-seal
|
||
| Electronic Connector | 9 pin male sub-D ，15 pin male sub-D ，DeviceNetTM，ProfiBus ，Analog | 9 pin male sub-D , EtherCAT | ||||
| Surface Finish | 25Ra | 10Ra | 25Ra | |||
| Weight | 1 Kg | 0.8 kg | 1.2 Kg | 1 Kg | 0.8 Kg | 1 Kg |
Features:
- Enhanced Accuracy and Rapid Response
The CS200 MFC offers improved accuracy with a tolerance of ±1.0% of S.P., and advanced models feature a reduced response time of less than 0.8 seconds. - Low Zero Drift and Temperature Coefficient
Utilizing innovative sensor technology, the CS200 MFC maintains stability and withstands temperature fluctuations. Without an auto-zero amplifier, it exhibits minimal zero drift of less than 0.6% F.S./year and a temperature coefficient of less than 0.02% F.S./℃ (zero) and 0.05% F.S./℃ (span). - Metal-Sealed Models and High Purity Feature
The wetted flow path of the CS200 MFC is constructed from surface-passivated stainless steel, ensuring high purity. All CS200 MFCs are assembled in ultraclean Class 100 cleanrooms according to SEMI and ISO 9001 standards. - Compatible Interfaces
The CS200 MFC supports various interfaces that can be selected by the customer, including ±8V to ±16V dual-end power supply or +14V to +28V single-end power supply. It is compatible with digital or analog signal input and output, adheres to SEMI standard mechanical dimensions, and can be equipped with an RS-485 or DeviceNet communications module. - Additional Functions
Each model of the CS200 MFC includes powerful customer software as standard, with additional functions such as support for multi-gas and multi-range applications, auto-zero capability, alarms, soft start, and delay, which can be selected based on customer requirements.
Download
Related products
Sevenstar Mass Flow Controller CS300 MFC
Sevenstar Mass Flow Controller CS330 MFC
Sevenstar Mass Flow Controller CS230 MFCs
