Sevenstar Mass Flow Controller CS230 MFCs
Enhanced Accuracy and Wide Full Scale Range
The CS230 MFC offers improved accuracy with a tolerance of ±1.0% of S.P., and it supports a large full-scale range of up to 300slm.
Description
Specification
| Type | CS230A | |
| Full scale range (N2) | (50,100,150,200,250,300) SLM | |
| Accuracy | ±1.0% S.P. (≥35% F.S.) ±0.35% F.S. (＜35% F.S.) | |
| Linearity | ±0.5% F.S. | |
| Repeatability | ±0.2% F.S. | |
| Response Time | ≤2sec | |
| Valve Rest Position | Normally Closed or Normally Open | No Valve |
| Differential Pressure |
0.15～0.35MPa 50SLM≤Flow(N2)＜150SLM
0.20～0.35MPa 150SLM≤Flow(N2)≤250SLM
0.25～0.40MPa 250SLM＜Flow(N2)≤300SLM
|
50~100SLM：<0.02MPa
>100SLM：<0.05MPa |
| Temperature Coefficient | Zero:≤±0.05% F.S./℃; Span：≤±0.1% F.S./℃ | |
| Maximum Pressure Working | 1 MPa | |
| Max Pressure | 3 MPa (435pisg) | |
| Zero Drift | ＜0.6%F.S. per year without autozero | |
| Leak integrity | 1×10-9 atm·cc / sec He | |
| Wetted Materials | Viton; Neoprene | |
| Operation Temperature | （5～45）℃ | |
| Input Signal |
Digital: RS485 or DeviceNetTM or ProfiBus
Analog:(0～5)VDC or (4～20)mA
|
N/A |
| Output Signal |
Digital: RS485 or DeviceNetTM or ProfiBus
Analog:(0～5)VDC or (4～20)mA
|
|
| Power Supply | ±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA) | |
| Fittings |
Compression Fitting φ6″, Compression Fitting 1/4″, (available to Flow(N2)≤60SLM)
Compression Fittingφ8mm(available to Flow(N2)≤ 200SLM)
Compression Fitting φ10mm, Compression Fitting 3/8″, Compression Fitting 1/2″, VCR 1/2″
|
|
| Electronic Connector | 9 pin male sub-D ；15 pin male sub-D ； DeviceNetTM male; or ProfiBus | |
| Weight | 2.6kg | 1.5kg |
Features:
- Enhanced Accuracy and Wide Full Scale Range
The CS230 MFC offers improved accuracy with a tolerance of ±1.0% of S.P., and it supports a large full-scale range of up to 300slm. - Low Zero Drift and Temperature Coefficient
Utilizing innovative sensor technology, the CS200 MFC maintains stability and can withstand temperature fluctuations. Without an auto-zero amplifier, it exhibits minimal zero drift of less than 0.6% F.S./year and a temperature coefficient of less than 0.02% F.S./℃ (zero) and 0.05% F.S./℃ (span). - Compatible Interfaces
The CS230 MFC is compatible with various interfaces that can be selected by the customer, including ±8V to ±16V dual-end power supply or +14V to +28V single-end power supply. It supports digital or analog signal input and output, SEMI standard mechanical dimensions, and can be equipped with an RS-485 or DeviceNetTM communications module. - Additional Functions
Each model of the CS230 MFC includes powerful customer software as standard, with optional functions such as support for multi-gas and multi-range applications, auto-zero capability, alarms, soft start, and delay, which can be selected based on customer requirements.
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