Sevenstar Mass Flow Controller CS300 MFC

Enhanced Accuracy and Rapid Response
The CS300 MFC achieves improved accuracy with a tolerance of ±0.8% of S.P., and the latest models boast a response time of less than 0.5 seconds.

Category:
Description

Specification

Type CS310C CS320C CS310D CS320D
Valve Rest Position Normally Open Normally Closed N/A Normally Closed or Normally Open N/A Normally Closed or Normally Open N/A Normally Closed or Normally Open
Full scale range (N2)
(0～1,2,3,5,10,20,30,50,100,200,300,500) SCCM
(0～1,2,3,5,10,20,30) SLM
Linearity ±0.5% F.S
Repeatability ±0.2% F.S
Response Time ≤ 0.8sec            （≤ 0.5sec  optional）
Differential Pressure 0.05~0.3MPa
Flow≤5SLM
0.1~0.3MPa
5SLM<Flow≤10SLM
0.2~0.3MPa
Flow>10SLM		 0.05～0.35MPa Flow≤10SLM
0.15～0.35MPa  Flow＞10SLM		 ＜0.02 MPa 0.05～0.35MPa Flow≤10SLM
0.15～0.35MPa  Flow＞10SLM		 ＜0.02 MPa 0.05～0.35MPa Flow≤10SLM
0.15～0.35MPa  Flow＞10SLM		 ＜0.02 MPa 0.05～0.35MPa Flow≤10SLM
0.15～0.35MPa  Flow＞10SLM
Temperature 
Coefficient
 Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃
Max Pressure 3.5 MPa 1 MPa 3.5 MPa 3.5 MPa
Leak integrity 1×10-11 Pa·m3 / sec He
Seal Materials Metal
Maximum operating pressure
 0.45MPa
Operation Temperature （0～50）℃
Input Signal
Digital: RS485 or DeviceNetTM or EtherCAT
Analog:(0～5)VDC
Digital: RS485 or DeviceNetTM or EtherCAT
Analog:(0～5)VDC
Digital: RS485 or DeviceNetTM or EtherCAT
Analog:(0～5)VDC
Digital: RS485 or DeviceNetTM or EtherCAT
Analog:(0～5)VDC
Output Signal
Digital: RS485 or DeviceNetTM or EtherCAT
Analog:(0～5)VDC
Zero Drift ＜0.6%F.S. per year without autozero
Power Supply ±8～±16 VDC (bipolar) 或 +14～+28 VDC (unipolar)
Surface chemical composition Cr/Fe ratio ＞2.0; CrO thickness ＞20 Angstroms
Fittings
VCR1/4” M
1.125″C Type
1.125″W Type
 1.5″B
1.5″C
1.5″W		 VCR1/4” M
1.125″C Type
1.125″W Type		 1.5″B
1.5″C
1.5″W
Electronic Connector  9 pin male sub-D ，15 pin male sub-D ，DeviceNetTM male，EtherCAT
Surface Finish Ra  5μinch
Weight 1 Kg 0.8Kg 1.2Kg 1Kg 1Kg 0.8Kg 0.8Kg 1Kg

Features:

  1. Enhanced Accuracy and Rapid Response
    The CS300 MFC achieves improved accuracy with a tolerance of ±0.8% of S.P., and the latest models boast a response time of less than 0.5 seconds.
  2. Low Zero Drift and Temperature Coefficient
    Utilizing innovative sensor technology, the CS230 MFC maintains stability and withstands temperature fluctuations. With no auto-zero amplifier, it exhibits minimal zero drift of less than 0.6% F.S./year and a temperature coefficient of less than 0.02% F.S./℃ (zero) and 0.05% F.S./℃ (span).
  3. Metal-Sealed Models and High Purity Feature
    The CS300 incorporates a special metal surface process and utilizes 316 stainless steel VV with a roughness of less than 5 RA, meeting the requirements of semiconductor standards.
  4. Compatible Interfaces
    The CS300 MFC supports various interfaces that can be selected by the customer, including ±8V to ±16V dual-end power supply or +14V to +28V single-end power supply, digital or analog signal input and output, SEMI standard mechanical dimensions, and RS-485 or DeviceNetTM communications module.
  5. Additional Functions
    Each model of the CS300 MFC includes powerful customer software as standard, with optional features such as multi-gas and multi-range support, auto-zero capability, alarms, soft start, and delay.
  6. CS300 MFCs support 1.125″, 1.5″ W, C IGS flange sizes.

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