Sevenstar Mass Flow Controller CS330 MFC
The CS330C and CS330D MFC/MFM feature a dual interface, supporting both voltage and current inputs, along with digital interfaces such as RS-485, DeviceNet, and ProfiBus. These interfaces allow for complete digital operation of the instrument, or it can be operated in analog mode with digital monitoring. The CS330C and CS330D series offer a wide range of power supply options, ranging from ±8 to ±16 VDC or +14 to +28 VDC. Additionally, the digital interface enables functionalities such as autoAlarm, operating gas change, and range adjustment. Customers have the option for secondary development of control and sample software using the open protocol.
The CS330C and CS330D MFC/MFM feature a dual interface, supporting both voltage and current inputs, along with digital interfaces such as RS-485, DeviceNet, and ProfiBus. These interfaces allow for complete digital operation of the instrument, or it can be operated in analog mode with digital monitoring. The CS330C and CS330D series offer a wide range of power supply options, ranging from ±8 to ±16 VDC or +14 to +28 VDC. Additionally, the digital interface enables functionalities such as autoAlarm, operating gas change, and range adjustment. Customers have the option for secondary development of control and sample software using the open protocol.
Specification
| Type | CS330C | CS330D | ||
| Valve Rest Position | Normally Closed | No Valve | Normally Closed | No Valve |
| Full scale range (N2) | (100,200) SLM | |||
| Accuracy | ±1.0% S.P. (＞35% F.S.) ±0.35% F.S. (≤35% F.S.) | |||
| Linearity | ±0.5% F.S. | |||
| Repeatability | ±0.2% F.S. | |||
| Response Time | ≤ 1 sec | |||
| Valve Rest Position | 400 ~ 600 KPa | ＜0.03MPa | 400 ~ 600 KPa | ＜0.03MPa |
| Differential Pressure | Zero: ≤±0.02% F.S./℃；Span：≤±0.1% F.S./℃ | |||
| Maximum Pressure Working | 0.6 MPa | |||
| Max Pressure | 1 MPa (435pisg) | |||
| Leak integrity | 5 x 10-12 Pa·m3/ sec He （5 x 10-11 atm.cc/sec He） | |||
| Wetted Materials | Metal | |||
| Operation Temperature | （0～50）℃ | |||
| Input Signal | Digital: RS485 or DeviceNet or EtherCAT Analog:(0～5)VDCor (4～20)mA |
N/A | Digital: RS485 or DeviceNet or EtherCAT Analog:(0～5)VDCor (4～20)mA |
N/A |
| Output Signal | Digital: RS485 or DeviceNet Analog:(0～5)VDC or (4～20)mA |
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| Zero Drift | ＜0.6%F.S. per year without autozero | |||
| Power Supply | ±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA) | |||
| Surface chemical composition | Chromium/iron ratio>2.0; Chromium oxide thickness>20 angstroms | normalcy | ||
| Fittings | VCR 1/2´´ | |||
| Electronic Connector | 9 pin male sub-D | 15 pin male sub-D | DeviceNetTM male | EtherCAT |
| Surface Finish | 5μinch Ra | 25μinch Ra | ||
| Weight | 1.8 Kg | 1.6 Kg | 1.8 Kg | 1.6 Kg |
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